Printing meets lithography: Soft approaches to high-resolution patterning.
Bruno MichelAndré BernardAlexander BietschEmmanuel DelamarcheMatthias GeisslerDavid JunckerHannes KindJean-Philippe RenaultHugo E. RothuizenHeinz SchmidPatrick Schmidt-WinkelRichard StutzHeiko WolfPublished in: IBM J. Res. Dev. (2001)