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Wafer Delay Analysis and Workload Balancing of Parallel Chambers for Dual-Armed Cluster Tools With Multiple Wafer Types.
Sung-Gil Ko
Tae-Sun Yu
Tae-Eog Lee
Published in:
IEEE Trans Autom. Sci. Eng. (2021)
Keyphrases
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massively parallel
data analysis
statistical analysis
integrated circuit
analysis tool
neural network
response time
parallel processing
parallel implementation
multiple types
visualization tool
semiconductor manufacturing