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A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure.
Jian-Qiu Huang
Baoye Li
Wenhao Chen
Published in:
Micromachines (2016)
Keyphrases
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low cost
sensor data
complex structures
image sensor
cmos image sensor
high speed
structural information
website
low power
sensor fusion
single chip
analog to digital converter