CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems.

Jaesik Lee Joseph Weiner Hsin-Hung Chen Yves Baeyens Vladimir Aksyuk Young-Kai Chen

Published in: CICC (2007)

Keyphrases

real time
knowledge based systems
distributed systems
low cost
processing capabilities
database
image sensor
learning systems
building blocks
high speed
expert systems
knowledge base
information systems
genetic algorithm
neural network
databases
data sets