AFM Tip Localization and Efficient Scanning Method for MEMS Inspection.
Huang-Chih ChenYi-Lin LiuChing-Chi HuangLi-Chen FuPublished in: IEEE Trans. Instrum. Meas. (2022)
Keyphrases
- high accuracy
- cost function
- fully automatic
- computationally efficient
- significant improvement
- support vector machine svm
- synthetic data
- detection method
- objective function
- experimental evaluation
- theoretical analysis
- augmented reality
- detection algorithm
- mutual information
- prior knowledge
- highly efficient
- data sets
- classification method
- localization method
- segmentation method
- support vector
- similarity measure
- decision trees