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Compensation of the residual error from the charge feedback control of a piezoelectric-actuated stage.
Sheng-Fan Wen
Jia-Yush Yen
Shih-Tang Liu
Fu-Cheng Wang
Min-Shin Chen
Yung-Yaw Chen
Chung-Wen Hung
Published in:
J. Syst. Control. Eng. (2017)
Keyphrases
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feedback control
residual error
open loop
closed loop
adaptive control
optimal control
control law
inverted pendulum
control scheme
fractional order
autonomous control
cost function
feedback controller
high voltage
nonlinear systems
control method
linear time invariant
circular arcs
control theory
control system