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Mechanical Test Structures for the Determination of Normal Stress in Multilayer Freestanding MEMS-Membranes.

Marvin MichelHolger Vogt
Published in: PRIME (2019)
Keyphrases
  • case study
  • training data
  • artificial neural networks
  • data mining
  • computer vision
  • information systems
  • image sequences
  • multiscale