Optimizing semiconductor processing open tube furnace performance: comparative analysis of PI and Mamdani fuzzy-PI controllers.
Wesley BeccaroCarlos A. S. RamosSilvio X. DuartePublished in: J. Intell. Manuf. (2023)
Keyphrases
- comparative analysis
- fuzzy control systems
- membership functions
- pi control
- fuzzy rules
- fuzzy reasoning
- fuzzy controller
- fuzzy membership functions
- fuzzy inference
- fuzzy model
- fuzzy sets
- fuzzy systems
- fuzzy logic
- fuzzy control
- fuzzy inference system
- fuzzy logic controller
- control system
- takagi sugeno
- neural fuzzy
- real time
- control strategy
- pi controller
- semi quantitative
- takagi sugeno fuzzy
- control algorithm
- computational intelligence
- neural network
- soft computing
- fuzzy clustering
- data processing
- information processing
- fuzzy rule based systems
- neuro fuzzy systems
- controller design
- genetic algorithm
- artificial neural networks
- steady state
- fuzzy neural network
- input output
- fuzzy modeling
- nonlinear systems
- fuzzy set theory
- control scheme