A sensor data mining process for identifying root causes associated with low yield in semiconductor manufacturing.
Eunji KimJinwon AnHyunchang ChoSungzoon ChoByeongeon LeePublished in: Data Technol. Appl. (2023)
Keyphrases
- semiconductor manufacturing
- root cause
- data mining process
- knowledge discovery
- data preprocessing
- data mining
- post processing
- root cause analysis
- mining algorithm
- process control
- data mining techniques
- real time
- production system
- data mining tools
- risk management
- general purpose
- data structure
- management system
- feature selection