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Surface and interface characterization of oxygen plasma activated anodic bonding of glass-ceramics to stainless steel.

Dehua XiongHong LiJinshu Cheng
Published in: Microelectron. Reliab. (2012)
Keyphrases
  • stainless steel
  • mechanical properties
  • thin film
  • flow patterns
  • high energy
  • scanning electron microscope
  • three dimensional
  • user interface
  • d objects
  • camera calibration