Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation.
James R. MorrisonPublished in: IEEE Trans Autom. Sci. Eng. (2011)
Keyphrases
- multi class
- semiconductor manufacturing
- discrete event simulation
- binary classification
- multi class classification
- binary classification problems
- feature selection
- support vector machine
- multiclass problems
- multiple classes
- pairwise
- model selection
- multistage
- cost sensitive classification
- real time
- perceptron algorithm
- process control
- learning models
- base classifiers
- cost sensitive
- dynamic programming
- feature extraction