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Simulation of levitation control for a micromachined electrostatically levitated gyroscope.
Qijun Xiao
Wenyuan Chen
Gaoyin Ma
Feng Cui
Shengyong Li
Weiping Zhang
Published in:
NEMS (2009)
Keyphrases
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control system
control method
control theory
simulation environment
mathematical model
data acquisition
simulation model
simulation study
control strategy
pid control
dynamic characteristics