Sign in
Resonant MEMS Pressure Sensor in 180 nm CMOS Technology Obtained by BEOL Isotropic Etching.
Diana Mata-Hernandez
Daniel Fernández
Saoni Banerji
Jordi Madrenas
Published in:
Sensors (2020)
Keyphrases
</>
cmos technology
low power
image sensor
power consumption
spl times
real time
low voltage