A class of impedance tomography based sensors for semiconductor manufacturing.

Michiel Krüger Kameshwar Poolla Costas J. Spanos

Published in: ACC (2004)

Keyphrases

semiconductor manufacturing
discrete event simulation
real time
data fusion
sensor networks
sensor data
image reconstruction
production system
machine learning
genetic algorithm
artificial intelligence
low cost
class labels
process control
sensor fusion
tomographic reconstruction