Spectral performance of a micromachined infrared spectrum analyzer in silicon.
Seong-Ho KongReinoud F. WolffenbuttelPublished in: IEEE Trans. Instrum. Meas. (2005)
Keyphrases
- infrared
- short wave
- thermal infrared
- hyperspectral
- visible spectrum
- infrared images
- multi sensor
- target detection
- high speed
- target detection and tracking
- hyperspectral data
- hyperspectral imagery
- electro optical
- infrared imagery
- focal plane
- automatic target recognition
- liquid crystal
- multiscale
- time of flight
- x ray
- mobile robot