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CMP monitoring and prediction based metal fill.

Philippe Morey-ChaisemartinEric BeisserJean-Claude MarinLidwine ChaizePascal GuyaderJulien Rosa
Published in: ISQED (2011)
Keyphrases
  • prediction accuracy
  • real time
  • monitoring system
  • prediction model
  • prediction error
  • neural network
  • website
  • databases
  • information retrieval
  • knowledge base
  • x ray