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Frequency response reduced order model of primary resonance of electrostatically actuated MEMS circular plate resonators.
Dumitru I. Caruntu
Reynaldo Oyervides
Published in:
Commun. Nonlinear Sci. Numer. Simul. (2017)
Keyphrases
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frequency response
reduced order model
power system
dynamic model
frequency domain
kalman filtering
controller design
kalman filter
control scheme
transfer function
signal to noise ratio
impulse response
fir filters
frequency band
closed loop
state variables
control law
high pass
mathematical model
state space