Analysis and control of wafer delays in a dual-armed cluster tool for a K-cyclic schedule.

Dong-Hyun Roh Tae-Eog Lee

Published in: SMC (2016)

Keyphrases

statistical analysis
neural network
computer vision
clustering algorithm
scheduling algorithm
analysis tool
data sets
databases
information retrieval
artificial intelligence
search engine
social networks
reinforcement learning
image analysis
quantitative analysis
software tools