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An ADRC-based CZ Silicon Single Crystal Growth Control Technology.
Zhiguo Wu
Lizhong Shui
Shuguang Liu
Zijian Wang
Published in:
ICCIR (2022)
Keyphrases
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rapid development
case study
control system
low cost
cost effective
real time
cmos technology
remote control
control theory
key technologies
control method
neural network
steady state
website
control strategies
data sets
database
control center