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Similarity matching of wafer bin maps for manufacturing intelligence to empower Industry 3.5 for semiconductor manufacturing.
Chia-Yu Hsu
Wei-Ju Chen
Ju-Chien Chien
Published in:
Comput. Ind. Eng. (2020)
Keyphrases
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semiconductor manufacturing
similarity matching
uncertain time series
process control
image retrieval
retrieval method
production system
video retrieval
database systems
feature extraction
data model
control system
video shots
video indexing