High performance lithographic hotspot detection using hierarchically refined machine learning.
Duo DingAndres J. TorresFedor G. PikusDavid Z. PanPublished in: ASP-DAC (2011)
Keyphrases
- machine learning
- automatic detection
- detection algorithm
- natural language processing
- data analysis
- knowledge representation
- artificial intelligence
- detection accuracy
- real time
- semi supervised learning
- high efficiency
- false alarms
- inductive learning
- early warning
- statistical methods
- false positives
- detection method
- knowledge acquisition
- text classification
- text mining
- supervised learning
- object detection
- pattern recognition
- learning algorithm
- model selection
- anomaly detection
- learning systems
- event detection
- support vector machine
- inductive logic programming
- case study
- decision trees
- information retrieval