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An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer.
Xiaoxiao Song
Huafeng Liu
Yanyan Fang
Chun Zhao
Ziqiang Qu
Qiu Wang
Liang Cheng Tu
Published in:
Sensors (2020)
Keyphrases
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high precision
high recall
high reliability
heat flow
high accuracy
permalloy films
sensor networks
heat transfer
surface temperature
achieve high precision
real time
machine learning
video sequences
data acquisition
high sensitivity
inertial sensors