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Run-to-Run Control of Thermal Atomic Layer Deposition.

Yichi ZhangYangyao DingZhe WuPanagiotis D. Christofides
Published in: MED (2020)
Keyphrases
  • control system
  • neural network
  • database
  • real time
  • data sets
  • information retrieval
  • decision making
  • face recognition
  • mobile robot
  • multi layer
  • control theory