Feedback Control of Cluster Tools for Regulating Wafer Delays.
Chulhan KimTae-Eog LeePublished in: IEEE Trans Autom. Sci. Eng. (2016)
Keyphrases
- feedback control
- closed loop
- optimal control
- adaptive fuzzy
- open loop
- adaptive control
- fractional order
- autonomous control
- networked control systems
- software tools
- inverted pendulum
- hierarchical clustering
- clustering algorithm
- feedback controller
- semiconductor manufacturing
- dynamic model
- cluster analysis
- machine learning