Anomaly detection for sensor data of semiconductor manufacturing equipment using a GAN.
Miki HashimotoYusuke IdeMasayoshi AritsugiPublished in: KES (2021)
Keyphrases
- sensor data
- anomaly detection
- semiconductor manufacturing
- sensor networks
- intrusion detection
- process control
- detecting anomalies
- data streams
- anomalous behavior
- network intrusion detection
- one class support vector machines
- sensor measurements
- raw sensor data
- intrusion detection system
- network anomaly detection
- detect anomalies
- network traffic
- production system
- sensor readings
- unsupervised learning
- pattern recognition
- real time
- machine learning
- wireless sensor networks
- health monitoring
- human activities
- low cost
- active learning
- image segmentation
- image processing
- negative selection algorithm
- cumulative sum
- information systems