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Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field.

Thitipat PermpatdechakulPanart KhajornrungruangKeisuke SuzukiAran BlattlerJiraphan Inthiam
Published in: Int. J. Autom. Technol. (2024)
Keyphrases
  • brownian motion
  • learning algorithm
  • special case
  • multiscale
  • cost function
  • differential equations