Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field.
Thitipat PermpatdechakulPanart KhajornrungruangKeisuke SuzukiAran BlattlerJiraphan InthiamPublished in: Int. J. Autom. Technol. (2024)