Detailed simulation for semiconductor manufacturing.
Robert W. AthertonLinda F. AthertonMark PoolPublished in: WSC (1990)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- production system
- machine learning
- wide range
- data sets
- mathematical model
- simulation software
- collision detection
- simulation models
- simulation model
- numerical simulations
- sufficient conditions
- state space
- significant improvement
- high level
- knowledge base
- social networks
- real world