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Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints.
Yan Qiao
Mengchu Zhou
Naiqi Wu
Zhiwu Li
Qinghua Zhu
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2021)
Keyphrases
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constrained optimization
constrained clustering
optimization algorithm
end users
optimization problems
global optimization
user friendly
cluster analysis
unsupervised clustering
neural network
e learning
clustering algorithm
microarray
data clustering
optimization process
semi supervised clustering