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Barrier and low k polish with a novel alkaline barrier slurry combining with FA/O chelating agent.
Jingbo Xu
Feng Hui
Wen-Zhong Xu
Xu Wang
Peng-Fei Nan
Yu-Ling Liu
Xin-Ping Qu
Published in:
ASICON (2013)
Keyphrases
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multi agent systems
multiagent systems
decision making
genetic algorithm
multi agent
intelligent agents
mobile agents
action selection
social networks
image sequences
agent model
combining multiple
pedagogical agents
high levels
cognitive agents