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Yield Evaluation of Gold Sensor Electrodes Used for Fully Electronic DNA Detection Arrays on CMOS.

Alexander FreyFranz HofmannR. PetersBirgit HolzapflMeinrad SchienleChristian PaulusPetra Schindler-BauerDirk KuhlmeierJürgen KrauseGerald EcksteinRoland Thewes
Published in: Microelectron. Reliab. (2002)
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