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Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon.

Alexander R. BestuginIrina A. KirshinaP. A. OkinOleg M. Filonov
Published in: Autom. Remote. Control. (2015)
Keyphrases
  • elastic properties
  • sensor networks
  • high speed
  • real time
  • pattern recognition
  • linear programming
  • data fusion
  • multi sensor