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Methodic errors of microelectromechanical pressure sensors in isotropic modeling of the elastic properties of single-crystal silicon.
Alexander R. Bestugin
Irina A. Kirshina
P. A. Okin
Oleg M. Filonov
Published in:
Autom. Remote. Control. (2015)
Keyphrases
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elastic properties
sensor networks
high speed
real time
pattern recognition
linear programming
data fusion
multi sensor