Robust Adaptive Resonant Damping Control of Nanopositioning.

Wei Wei Pengfei Xia Zaiwen Liu Min Zuo

Published in: ISNN (2) (2019)

Keyphrases

control strategy
control system
control problems
dynamic model
open loop
operating conditions
control method
sufficient conditions
vision system
optimal control
high resolution
multiresolution
optimal design
process control
genetic algorithm
feedback control
database