Discovering deposition process regimes: leveraging unsupervised learning for process insights, surrogate modeling, and sensitivity analysis.
Geremy Loachamín SuntaxiParis PapavasileiouEleni D. KoronakiDimitrios G. GiovanisGeorgios GakisIoannis G. AviziotisMartin KathreinGabriele PozzettiChristoph CzettlStéphane P. A. BordasAndreas G. BoudouvisPublished in: CoRR (2024)