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Improved algorithm for automated alignment of wafers via optimized features location.

Michael ParshinZeev Zalevsky
Published in: J. Electronic Imaging (2009)
Keyphrases
  • improved algorithm
  • feature vectors
  • feature extraction
  • low level
  • neural network
  • genetic algorithm
  • feature space
  • co occurrence
  • false positives
  • feature set
  • feature analysis
  • discriminant function