Displacement measurement technology of nano grating sensor based on HHT algorithm.
Cuili JiangZhihui TianWenjiao YuPublished in: Microelectron. J. (2021)
Keyphrases
- detection algorithm
- times faster
- improved algorithm
- experimental evaluation
- dynamic programming
- learning algorithm
- high accuracy
- computational cost
- preprocessing
- computational complexity
- recognition algorithm
- estimation algorithm
- theoretical analysis
- neural network
- matching algorithm
- classification algorithm
- measurement error
- segmentation algorithm
- computationally efficient
- expectation maximization
- input data
- linear programming
- k means
- optimal solution
- objective function
- case study