Login / Signup
Direct bonding SOI Wafer based MEMS cantilever resonator for trace gas sensor applicaiton.
Dong Ying
Wei Gao
You Zheng
Published in:
NEMS (2009)
Keyphrases
</>
sensor data
genetic algorithm
sensor networks
multi sensor
semiconductor manufacturing
real time
data mining
social networks
process control
signal analysis
database
databases
computer vision
genetic search
execution traces