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Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique.

Farooq AhmadJohn Ojur DennisNor Hisham HamidMohd Haris M. KhirAbdelaziz Yousif Ahmed
Published in: APCCAS (2010)
Keyphrases
  • magnetic field
  • working principle
  • mechanical design
  • design process
  • case study
  • user interface
  • state space
  • markov chain
  • cellular automata
  • modeling tool
  • electromagnetic fields
  • magneto optic
  • permanent magnet