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Design and modeling of MEMS resonator for magnetic field sensing using hybrid actuation technique.
Farooq Ahmad
John Ojur Dennis
Nor Hisham Hamid
Mohd Haris M. Khir
Abdelaziz Yousif Ahmed
Published in:
APCCAS (2010)
Keyphrases
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magnetic field
working principle
mechanical design
design process
case study
user interface
state space
markov chain
cellular automata
modeling tool
electromagnetic fields
magneto optic
permanent magnet