Optical deflection measurement for characterization of microelectromechanical systems (MEMS).

Samara L. FirebaughHarry K. Charles Jr.R. L. EdwardsA. C. KeeneyS. F. Wilderson
Published in: IEEE Trans. Instrum. Meas. (2004)
Keyphrases
  • management system
  • distributed systems
  • learning systems
  • database
  • multi agent
  • high speed
  • intelligent systems
  • building blocks
  • solid state
  • neural network
  • decision making
  • knowledge base
  • expert systems
  • retrieval systems