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Microfabricated SOI pressure sensor using dynamically balanced lateral resonator.

Sen RenWeizheng YuanXiaodong SunJinjun DengDayong QiaoChengyu Jiang
Published in: NEMS (2014)
Keyphrases
  • sensor data
  • sensor networks
  • multi sensor
  • real time
  • data acquisition
  • changing environment
  • imaging sensors
  • computer vision
  • decision trees
  • computational complexity
  • signal analysis
  • vision sensor
  • sensor web