Comprehensive 300 mm process for Silicon spin qubits with modular integration.
A. ElsayedClement GodfrinNard I. Dumoulin StuyckM. M. K. ShehataStefan KubicekS. MassarYann CanvelJulien JussotAndriy HikavyyRoger LooGeorge SimionMassimo MongilloD. WanBogdan GovoreanuR. LiIuliana P. RaduP. Van DorpeKristiaan De GrevePublished in: VLSI Technology and Circuits (2023)