Low temperature deposition of SiNx thin films by the LPCVD method.
Zdenko TijanicDavor RisticMile IvandaIvancica Bogdanovic-RakovicMarijan MarciusMira RisticOzren GamulinSvetozar MusicKresimir FuricAlessandro ChiaseraMaurizio FerrariGiancarlo Cesare RighiniPublished in: MIPRO (2011)