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Prognostics and Health Management of Wafer Chemical-Mechanical Polishing System using Autoencoder.

Kart-Leong LimRahul Dutta
Published in: ICPHM (2021)
Keyphrases
  • health management
  • engineering systems
  • data analysis
  • genetic algorithm
  • data sets
  • expert systems
  • evolutionary algorithm
  • naive bayes
  • logistic regression