Artificial Intelligence in Semiconductor Manufacturing for Process Development, Functional Diagnostics, and Yield Crash Prevention.
Mary C. Murphy-HoyePublished in: ITC (1986)
Keyphrases
- artificial intelligence
- semiconductor manufacturing
- development process
- software engineering
- process control
- design process
- case study
- expert systems
- knowledge based systems
- knowledge engineering
- genetic algorithm
- knowledge representation
- software development
- intelligent agents
- process model
- machine learning
- development cycle
- development effort
- neural network
- development environment
- st century
- information processing
- search engine
- information retrieval