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Reticle Design for Minimizing Multiproject Wafer Production Cost.
Rung-Bin Lin
Meng-Chiou Wu
Shih-Cheng Tsai
Published in:
IEEE Trans Autom. Sci. Eng. (2007)
Keyphrases
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production cost
machine learning
reinforcement learning
design process
database
genetic algorithm
multi dimensional
complex systems
manufacturing systems