High Performance and Yield for Super Steep Retrograde Wells (SSRW) by Well Implant / Si-based Epitaxy on Advanced Technology FinFETs.
U. RanaD. P. BruncoS. RamanDina H. TriyosoM. W. StokerJ. B. JohnsonLuigi PantisanoK. D. SeoM. ZhaoA. ReznicekR. KrishnanB. MoserJ. FreemanL. JangE. KaganerPublished in: DRC (2019)
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