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Characterizing and resolving unobservability in run-to-run control of high mix semiconductor manufacturing.
Farshad Harirchi
Tyrone Vincent
Anand Subramanian
Kameshwar Poolla
Broc Stirton
Published in:
CDC (2013)
Keyphrases
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semiconductor manufacturing
process control
neural network
website
wide range
multiresolution
control system
databases
genetic algorithm
artificial intelligence
image processing
hidden markov models
supply chain
control strategy