A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation.
ChunRong PanYan QiaoNaiqi WuMengChu ZhouPublished in: IEEE Trans. Syst. Man Cybern. Syst. (2015)
Keyphrases
- learning algorithm
- recognition algorithm
- data clustering
- theoretical analysis
- computational complexity
- preprocessing
- search space
- k means
- computational cost
- worst case
- expectation maximization
- simulated annealing
- high accuracy
- probabilistic model
- segmentation algorithm
- constraint sets
- objective function
- convex hull
- optimization algorithm
- experimental evaluation
- linear programming
- significant improvement
- np hard
- association rules
- graph cuts
- data structure
- detection algorithm
- constraint satisfaction
- cost function
- data mining
- clustering algorithm
- semiconductor manufacturing
- multiple constraints