Analytical Modeling of the Mechanical Behavior of MEMS/NEMS-Multilayered Resonators With Variable Cross-Sections for Sensors and Energy Harvesters.
Eustaquio Martínez-CisnerosLuis A. Velosa-MoncadaErnesto A. Elvira-HernándezOmar Isaac Nava-GalindoLuz Antonio Aguilera-CortésRené Pérez-CuapioArxel de LeónFrancisco López-HuertaRolando SalgadoAgustín Leobardo Herrera-MayPublished in: IEEE Access (2021)