Fuzzy neural network-based rescheduling decision mechanism for semiconductor manufacturing.
J. ZhangW. QinL. H. WuW. B. ZhaiPublished in: Comput. Ind. (2014)
Keyphrases
- semiconductor manufacturing
- discrete event simulation
- process control
- fuzzy decision
- fuzzy sets
- neural network
- decision making
- fuzzy logic
- fuzzy numbers
- fuzzy clustering
- real time
- membership functions
- data sets
- ahp method
- artificial intelligence
- fuzzy controller
- decision process
- fuzzy classification
- decision makers
- fuzzy set theory
- fuzzy ontology
- rough sets
- group decision making
- learning mechanism
- fuzzy rules
- fuzzy neural network
- power system
- dynamic systems
- petri net
- production system
- decision rules