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Design and Optimization of a Stationary Electrode in a Vertically-Driven MEMS Inertial Switch for Extending Contact Duration.

Qiu XuZhuo-qing YangBo FuYan-Ping BaoHao WuYun-Na SunMengyuan ZhaoJian LiGuifu DingXiao-Lin Zhao
Published in: Sensors (2017)
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